本課程為介紹半導體元件製作之基本課程,從積體電路介紹與歷史展望、晶體成長、晶圓製造與矽晶圓的基本性質、積體電路製程技術、CMOS製程的介紹,以及未來技術發展的趨勢,使學生能對半導體工程技術有基本的整體概念。

This course is a basic course that introduces the production of semiconductor components. It covers the introduction and historical outlook of integrated circuits, crystal growth, wafer manufacturing and the basic properties of silicon wafers, the introduction of integrated circuit process technology, CMOS process, and future technology development trends, so that students can have a basic overall concept of semiconductor engineering technology.

本課程為奈米電子與能源技術組規劃之基礎積體電路製程專業課程，使學生了解奈米積體電路製造技術的基本知識，並培養其了解半導體產業之實務觀念。希望同學修完這門課程，可以在研究及實務上均有幫助，未來不管是繼續升學及工作都可以具備奈米積體電路製程的知識。

This course is a basic integrated circuit manufacturing professional course planned by the Nanoelectronics and Energy Technology Group. It enables students to understand the basic knowledge of nanometer integrated circuit manufacturing technology and cultivates their understanding of the practical concepts of the semiconductor industry. I hope that after completing this course, students will be able to benefit from both research and practice, and that they will have knowledge of nano-integrated circuit processes whether they continue their studies or work in the future.

蕭 宏，半導體製程技術導論，第四版，全華圖書，2024.04

Xiao Hong, Introduction to Semiconductor Process Technology, Fourth Edition, Quanhua Books, 2024.04