介紹固體薄膜沉積技術及原理,並透過專題實作熟悉相關製程技術及特性分析
1. 簡介
2. 薄膜形成的熱力學機制
3. 表面動力學
4. 真空技術
5. 蒸鍍
6. 濺鍍
7. 化學氣相沉積
8. 材料分析技術
9. SEM
10. TEM
11. XRD
12. RamanIntroduce solid film deposition technology and principles, and familiarize yourself with relevant process technology and characteristic analysis through special implementation
1. Introduction
2. Thermodynamic mechanism of film formation
3. Surface Dynamics
4. Vacuum technology
5. Evaporation
6. Sputtering
7. Chemical vapor deposition
8. Material Analysis Technology
9.SEM
10. TEM
11.XRD
12.Raman
1. Thin Film Deposition Principle and practice, Donald L. Smith, 1995, McGraw-Hill Inc.
2. Optical Diagnostics for Thin Film Processing, Irving P.Herman, 1996, Academic Press
3. 講義
4. Introduction to solid state physics 8 edition (Charles Kittle)
1. Thin Film Deposition Principle and practice, Donald L. Smith, 1995, McGraw-Hill Inc.
2. Optical Diagnostics for Thin Film Processing, Irving P.Herman, 1996, Academic Press
3. Handouts
4. Introduction to solid state physics 8 edition (Charles Kittle)
| 評分項目 Grading Method | 配分比例 Grading percentage | 說明 Description |
|---|---|---|
| 平常成績平常成績 normal grades |
40 | 包括出席, 作業,問答 |
| 報告報告 report |
40 | 專題書面及口頭報告 |
| 小考小考 Quiz |
20 | 隨堂小考 |
