1. 培育學生半導體製程能力
2. 了解材料濺鍍的工作原理
3. 因應日後課業或研究所需1. Cultivate students' semiconductor processing capabilities
2. Understand how material bulbs work
3. As required for future courses or research
書名 : Handbook of Sputter Deposition Technology
作者 : Kiyotaka Wasa, Isaku Kanno, and Hidetoshi Kotera
出版年份 : 2012
出版商 : William Andrew
Book name: Handbook of Sputter Deposition Technology
Author: Kiyotaka Wasa, Isaku Kanno, and Hidetoshi Kotera
Year of publication: 2012
Publisher: William Andrew
| 評分項目 Grading Method | 配分比例 Grading percentage | 說明 Description |
|---|---|---|
| 出席出席 Attend |
50 | |
| 專題報告專題報告 Special Report |
50 |
