5330 - 薄膜物理專題（一）
Special Topics on Thin Film
教育目標 Course Target
介紹固體薄膜沉積技術及原理,並透過專題實作熟悉相關製程技術及特性分析1. 簡介
2. 薄膜形成的熱力學機制
3. 表面動力學
4. 真空技術
5. 蒸鍍
6. 濺鍍
7. 化學氣相沉積
8. 材料分析技術
Introduction to solid film deposition technology and principles, and through topics to familiarize yourself with relevant process technologies and characteristics analysis 1. Introduction
2. The heat-mechanism of film formation
3. Surface dynamics learning
4. Vacuum technology
5. Steamed
6.
7. Chemical ambient
8. Material Analysis Technology
參考書目 Reference Books
1. Thin Film Deposition Principle and practice, Donald L. Smith, 1995, McGraw-Hill Inc.
2. Optical Diagnostics for Thin Film Processing, Irving P.Herman, 1996, Academic Press
3. 講義
4. Introduction to solid state physics 8 edition (Charles Kittle)
1. Thin Film Deposition Principle and practice, Donald L. Smith, 1995, McGraw-Hill Inc.
2. Optical Diagnostics for Thin Film Processing, Irving P.Herman, 1996, Academic Press
3. Lecture
4. Introduction to solid state physics 8 edition (Charles Kittle)
評分方式 Grading
| 評分項目 Grading Method |
配分比例 Percentage |
說明 Description |
|---|---|---|
|
平常成績 Normal achievements |
40 | 包括出席, 作業,問答 |
|
報告 report |
40 | 專題書面及口頭報告 |
|
小考 Small exam |
20 | 隨堂小考 |
授課大綱 Course Plan
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課程資訊 Course Information
基本資料 Basic Information
- 課程代碼 Course Code: 5330
- 學分 Credit: 3-0
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上課時間 Course Time:Thursday/9,Friday/9,10[BS511]
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授課教師 Teacher:蕭錫鍊
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修課班級 Class:應物系3,4,碩博
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選課備註 Memo:大34可選修；須經授課教師同意，人工選課
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