本課程涵蓋半導體製程、材料和元件特性量測相關的實驗，希望修課同學對半導體實驗有初步概念及實作體會。課程重點在於介紹半導體相關的材料成長技術，從講解說明與實地觀察，再配合儀器量測，使學生對材料特性有深一層認識。本實驗著重半導體元件之設計、製程及量測分析，使學生從親手製作元件中，了解半導體製程的原理與方法。從各種材料和元件特性量測中，使學生了解量測的原理和方法，並熟悉量測儀器的操作。This course covers experiences related to semiconductor processing, material and component characteristic measurement. I hope that students in the course will have preliminary concepts and practical meetings for semiconductor experiments. The focus of the course is to introduce semiconductor-related material growth techniques, from explanation and practical observation, and combined with instrument measurement, so that students can have a deeper understanding of material characteristics. This experiment focuses on the design, process and quantity analysis of semiconductor components, so that students can understand the principles and methods of semiconductor processing from hand-made components. From the measurement of various materials and components characteristics, students can understand the principles and methods of measurement and be familiar with the operation of the measurement instrument.
1 半導體製程技術導論，Hong Xiao著，羅正忠、張鼎張譯，台灣培生教育出版股份有限公司
2 自編講義
1 Semiconductor Processing Technology Conductor, by Hong Xiao, Luo Zhengzhong and Zhang Ding Zhang Lu, Taiwan Pesheng Education Publishing Co., Ltd.
2 Self-edited lectures
| 評分項目 Grading Method | 配分比例 Grading percentage | 說明 Description |
|---|---|---|
| 考試及模擬考試及模擬 Exam and simulation |
30 | |
| 期中報告期中報告 Midterm Report |
30 | |
| 期末報告期末報告 Final report |
30 | |
| 出席出席 Attend |
10 |
