1. 培育學生半導體製程能力
2. 了解電漿蝕刻的工作原理
3. 因應日後課業或研究所需1. Cultivate students' semiconductor processing capabilities
2. Understand how electric etching works
3. As required for future courses or research
作者 : Dennis M. Manos, and Daniel L. Flamm
書名 : Plasma Etching: An Introduction
版本 : 1 edition
出版商 : Academic Press
出版年份 : 1989
Author: Dennis M. Manos, and Daniel L. Flamm
Book name: Plasma Etching: An Introduction
Version: 1 edition
Publisher: Academic Press
Year of publication: 1989
| 評分項目 Grading Method | 配分比例 Grading percentage | 說明 Description |
|---|---|---|
| 出席出席 Attend |
50 | |
| 專題論文報告專題論文報告 Special Profile Report |
50 |
