介紹薄膜材料製程技術及物理性質分析.
包括:
1.真空技術
2.物理氣相沉積
3.化學氣相沉積
4.薄膜成核成長原理
5.材料分析技術Introduction to the process technology and physical properties analysis of thin film materials.
include:
1. Vacuum technology
2. Physical aura aggregation
3. Chemical gas phase aggregation
4. Principle of thin film nucleation and growth
5. Material Analysis Technology
1. Optical Diagnostics for Thin Film Processing, Irving P.Herman, 1996, Academic Press
2. 講義
3. Introduction to solid state physics 8 edition (Charles Kittle)
4. Thin Film Deposition
1. Optical Diagnostics for Thin Film Processing, Irving P.Herman, 1996, Academic Press
2. Lecture
3. Introduction to solid state physics 8 edition (Charles Kittle)
4. Thin Film Deposition
| 評分項目 Grading Method | 配分比例 Grading percentage | 說明 Description |
|---|---|---|
| 平常成績平常成績 Normal achievements |
40 | 包括出席, 作業,問答 |
| 報告報告 report |
40 | 專題書面及口頭報告 |
| 小考小考 Small exam |
20 | 隨堂小考 |
